Hostname: page-component-76fb5796d-zzh7m Total loading time: 0 Render date: 2024-04-29T12:06:47.554Z Has data issue: false hasContentIssue false
  • English
  • Français

Diamond Chemical Vapor Deposition: Gas Compositions and film Properties

Published online by Cambridge University Press:  21 February 2011

Peter K. Bachmann ,
Hans-Jürgen Hagemann ,
Hartmut Lade ,
Dieter Leers ,
Frederike Picht ,
Detlef U. Wiechert  and
Howard Wilson
Peter K. Bachmann
Affiliation:
Philips Research Laboratories, P.O. Box 1980, D-52021 Aachen, Germany.
Hans-Jürgen Hagemann
Affiliation:
Philips Research Laboratories, P.O. Box 1980, D-52021 Aachen, Germany.
Hartmut Lade
Affiliation:
Philips Research Laboratories, P.O. Box 1980, D-52021 Aachen, Germany.
Dieter Leers
Affiliation:
Philips Research Laboratories, P.O. Box 1980, D-52021 Aachen, Germany.
Frederike Picht
Affiliation:
Philips Research Laboratories, P.O. Box 1980, D-52021 Aachen, Germany.
Detlef U. Wiechert
Affiliation:
Philips Research Laboratories, P.O. Box 1980, D-52021 Aachen, Germany.
Howard Wilson
Affiliation:
Philips Research Laboratories, P.O. Box 1980, D-52021 Aachen, Germany.
Get access

Abstract

Rate, crystallinity and phase purity of vapor-grown diamond deposits are discussed. Emphasis is on microwave plasma CVD of diamond from C/H-, C/H/O-, C/H/F-, C/H/CI- and C/H/N-gas mixtures.

The manufacture of wear-resistant diamond thin films, diamond vacuum window membranes and thick diamond heat spreader plates are used as examples to outline the influence of various deposition parameters on the performance of finished products and to describe the use of ternary gas phase compositional diagrams as tools for minimization of deposition technology and product optimization efforts.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 339: Symposium D – Diamond, Silicon Carbide and Nitride Wide Bandgap Semiconductors , 1994 , 267
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Spitsyn, B.V., Bouilov, L.L., and Derjaguin, B.V., J. of Crystal Growth, 52, 219 (1981).Google Scholar
[2] Matsumoto, S., Sato, Y., Kamo, M., and Setaka, N., Jpn. J. of Appl. Phys. 21, L183 (1982).Google Scholar
[3] Kamo, M., Sato, Y., Matsumoto, S., and Setaka, N., J. of Crystal Growth, 62, 642 (1983).Google Scholar
[4] Bachmann, P.K., in “Thin Film Diamond” edited by Lettington, A. and Steeds, J.W., Chapman and Hall Royal Society London, ISBN 0–412–49630–5 (1994).Google Scholar
[5] Bachmann, P.K., Enckefort, W. v., Diamond and Related Materials, Vol. 1, 1021 (1992).Google Scholar
[6] Bachmann, P.K., Leers, D., and Lydtin, H., Diamond and Related Materials, Vol. 1, No. 1, 1 (1991).Google Scholar
[7] Hirose, Y., Ananuma, S., Okada, N., Komaki, K., “1st Intl. Symp.on Diamond and Diamond-Like Films”, The Electrochem. Soc. Pennington, NJ, Proceedings, Vol. 89–12, 80 (1989).Google Scholar
[8] Bachmann, P.K., Leers, D., and Wiechert, D.U., presented at DIAMOND 1992, paper 4.2 (unpublished) Aug. 31-Sept. 4, 1992, Heidelberg, GermanyGoogle Scholar
[9] Paroli, P., presented at, ADC'93, 2. Intl. Conference on the Applications of Diamond Films and Rel. Materials Aug. 25–27, 1993, Omiya, Saitama, Japan.Google Scholar
[10] Fryda, M., Iages, C.P.K. Diamond and Rel. Mat.,in press, (1994)Google Scholar
[11] Prijaya, N.A., Angus, J. C., Bachmann, P.K. Diamond and Rel. Mat., Vol. 3, No. 1–2, 129 (1993)Google Scholar
[12] Patterson, D.E., Bai, B.J., Chu, C.J., Hauge, R.H..and Margrave, J.L. in “New Diamond Science and Technology”, edited by Messier, R.F., Glass, J.T., Butler, J.E., and Roy, R., Mater. Res. Soc. Pittsburgh, PA, 433 (1991).Google Scholar
[13] Wong, M.S., Wu, C.H., Diamond and Related Materials, 1, 369 (1992)Google Scholar
[14] Kadono, M., Inoue, T., Miyanaga, M., Yamazaki, S., Appl. Phys. Lett. 61, 7, 772 (1992).Google Scholar
[15] Rudder, R.A., Hudson, G.C., Malta, D.P., Posthill, J.B., Thomas, R.E., Markunas, R.J., in [Applications of Diamond and Related Materials, edited by Teng, Y., Yoshikawa, M., Muranaka, M., Feldman, A., Elsevier Science Publishers, 583 (1991).Google Scholar
[16] Chu, C.H., Hon, M.H., presented at DIAMOND 1992, Heidelberg, Germany (unpublished) (1992).Google Scholar
[17] Hong, F.C., Hsieh, J. C., Wu, J.J., presented at DIAMOND 1992, Heidelberg, Germany (unpublished) (1992).Google Scholar
[18] Bachmann, P.K., Hagemann, H.J., Lade, H., Leers, D., Picht, F., Wiechert, D.U., presented at [Diamond Films'93], paper 2.2 (unpublished), Albufeira, Portugal, Sept. 20–24, 1993.Google Scholar
[19] Bachmann, P.K. and Wiechert, D.U., Diamond and Related Materials, Vol. 1, 422 (1992).Google Scholar
[20] Bachmann, P.K., Lade, H., Leers, D., Wiechert, D.U. presented at “Diamond Films'93”, paper 16.2 (unpublished), Albufeira, Portugal, Sept. 20–24, 1993.Google Scholar
[21] Pongratz, P., Joksch, M., Bachmann, P.K., Leers, D. to be published.Google Scholar
[22] Bachmann, P.K., Lade, H., Leers, D., Wiechert, D.U. presented at “Diamond Films'93”, paper 12.062 (unpublished), Albufeira, Portugal, Sept. 20–24, 1993. Diamond and Related Materials, in press, (1994)Google Scholar
[23] Bachmann, P.K., Hagemann, H.J., Lade, H., Leers, D., Wiechert, D.U., Wilson, H., submitted for presentation at “Diamond Films '94”, (unpublished) Castelvecchio Pascoli, Italy, Sept. 25–30, 1994.Google Scholar