Skip to main content Accessibility help
×
Home
Hostname: page-component-59b7f5684b-npccv Total loading time: 0.299 Render date: 2022-10-01T14:05:22.314Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "displayNetworkTab": true, "displayNetworkMapGraph": true, "useSa": true } hasContentIssue true

Co/HfO2 core shell nanocrystal memory

Published online by Cambridge University Press:  01 February 2011

Huimei Zhou
Affiliation:
hzhou@ee.ucr.edu, UCR, Department of Electrical Engineering, Riverside, California, United States
James Anthony Dorman
Affiliation:
jadorman@ucla.edu
Ya-Chuan Perng
Affiliation:
sandyperng@ucla.edu, UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Stephanie Gachot
Affiliation:
sgachot@ucla.edu, UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Jian Huang
Affiliation:
jian.huang002@email.ucr.edu, UCR, Department of Electrical Engineering, Riverside, California, United States
Yuanbing Mao
Affiliation:
yuanbing@seas.ucla.edu, UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Jane Chang
Affiliation:
jpchang@seas.ucla.edu, UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Jianlin Liu
Affiliation:
jianlin@ee.ucr.edu
Get access

Abstract

Metal/high-k dielectric core shell nanocrystal memory capacitor was demonstrated. This kind of MOS memory shows good performance in charge storage capacity, programming and erasing speed. By using a self-assembled Block Co-Polymer, Co/HfO2 core shell nanocrystals were well arrayed and showed uniform dot size and inter distance between dots. Compared with traditional metal nanocrystal fabrication process with E-Beam Evaporation followed by RTA (Rapid Thermal Annealing), core shell nanocrystal memory prepared by Block Co-Polymer produces a wide memory window of 8.4V at the ±12 V voltage sweep. Co/HfO2 core shell nanocrystals prepared by low-temperature Block Co-polymer process ensure high reliability of the devices.

Type
Research Article
Copyright
Copyright © Materials Research Society 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Tiwari, S. Rana, F. Hanafi, H. Hartstein, A. Crabbe, E.F. and Chan, K. Appl. Phys. Lett., 68 p. 1377, (1996).CrossRefGoogle Scholar
2 King, Y.C. King, T.J. and Hu, C. IEEE Trans. Electron Devices, 48 p. 696, (2001).CrossRefGoogle Scholar
3 Shi, Y. Saito, K. Ishikuro, H. and Hiramoto, T. J. Appl. Phys., 84 p. 2358, (1998).CrossRefGoogle Scholar
4 Wu, L.C. Dai, M. Huang, X.F. Li, W. and Chen, K.J. J. Vac. Sci. Technol., B 22, p. 678, (2004).10.1116/1.1676527CrossRefGoogle Scholar
5 Yeh, P.H. Chen, L.J. Liu, P.T. Wang, D.Y. and Chang, T.C. Electrochimica Acta, 52 pp. 2920–2926, (2007)CrossRefGoogle Scholar
6 Choi, S. Kim, S. S. Chang, M. Hwang, H. S. and etc., Appl. Phys. Lett., 86, 123110 (2005).CrossRefGoogle Scholar
7 Lin, Yu-Hsien, Chien, Chao-Hsin, Lin, Ching-Tzung, Chang, Chun-Yen, and Lei, Tan-Fu, IEEE Electron Device Letters, 26, pp. 154156 (2005)Google Scholar
8 Chen, J. H. Yoo, W. J. Chan, D. S. H. and Tang, L. J. Appl. Phys. Lett., 86, 073114 (2005).CrossRefGoogle Scholar
9 Kim, Eunkyeom, Kim, Kyongmin, Son, Daeho, Kim, Jeongho, Lee, Kyungsu, Won, Sunghwan, Sok, Junghyun, Hong, Wan-Shick, and Park, Kyoungwan, Journal of Semiconductor Technology and Science, 8, pp. 2731, (2008)CrossRefGoogle Scholar
10 Ohba, R. Sugiyama, N. Uchida, K. and etc., IEEE Trans. Electron Devices, 49, 1392 (2002).CrossRefGoogle Scholar
11 Takata, M. Kondoh, S. Sakaguchi, T. Choi, H. Shim, J. C. Kurino, H. and Koyanagi, M. Tech. Dig. - Int. Electron Devices Meet., 553, (2003).Google Scholar
12 Lee, C. Gorur-Seetharam, A., and Kan, E. C. Tech. Dig. - Int. Electron Devices Meet., 557, (2003).Google Scholar
13 Zhou, Huimei, Gann, Reuben, Li, Bei, Liu, Jianlin and Yarmoff, J. A. Mater. Res. Soc. Symp. Proc., Vol. 1160 1160–H01 (2009)10.1557/PROC-1160-H01-05CrossRefGoogle Scholar
14 Liu, Z. Lee, C. Narayanan, V. Pei, G. and Kan, E. C. IEEE Trans. Electron Devices, 49, 1606, (2002).CrossRefGoogle Scholar
15 Kim, JooHyung, Yang, JungYup, Lee, JunSeok, and Hong, JinPyo, Appl. Phys. Lett., 92, 013512, (2008)CrossRefGoogle Scholar
16 Lee, Jong Jin, Harada, Yoshinao, Pyun, Jung Woo and Kwong, Dim-Lee, Appl. Phys. Lett., 86, 103505, (2005)CrossRefGoogle Scholar
17 Robertson, J., Sharia, O. and Demkov, A. A. Appl. Phys. Lett., 91, 132912 (2007)10.1063/1.2790479CrossRefGoogle Scholar
18 Niwa, M. IEDM-SC, (2000)Google Scholar
19 Zhu, Yan, Li, Bei, and Liu, Jianlin, J. Appl. Phys., 101, 063702 (2007)CrossRefGoogle Scholar
20 Perng, Y-C. Dorman, J. A. Gachot, S. Mao, Y. and Chang, J. P. in preparation.Google Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Co/HfO2 core shell nanocrystal memory
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Co/HfO2 core shell nanocrystal memory
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Co/HfO2 core shell nanocrystal memory
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *