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Characterization of the Charging and Long Term Performance of Cytop Electret Layers for MEMS Applications

Published online by Cambridge University Press:  01 February 2011

Ulrich Bartsch ,
Joao Gaspar  and
Oliver Paul
Ulrich Bartsch
Affiliation:
bartsch@imtek.de, University of Freiburg, Department of Microsystems Engineering (IMTEK), Germany
Joao Gaspar
Affiliation:
gaspar@imtek.de, University of Freiburg, Department of Microsystems Engineering (IMTEK), Germany
Oliver Paul
Affiliation:
paul@imtek.de, University of Freiburg, Department of Microsystems Engineering (IMTEK), Germany
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Abstract

This paper reports on the characterization of the charge stability of an amorphous fluoropolymer electret called Cytop. Cytop is a dissolved polymer material, compatible with standard micromachining fabrication technologies. In this study, Cytop layers are deposited and patterned on Pyrex and silicon substrates, followed by the electrical poling of the material by corona discharge using a customized charging station. The long-term performance of Cytop as an electret material is evaluated as a function of several relevant charging parameters. The results reveal highly stable layers, able to keep at least 92% of the initial charge 143 days after the corona charging stored at 23°C.

Keywords

polymermicroelectro-mechanical (MEMS)dielectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1134: Symposium BB – Polymer-Based Smart Materials–Processes, Properties and Application , 2008 , 1134-BB08-17
Copyright
Copyright © Materials Research Society 2009

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References

REFERENCES

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