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Carbon Film Synthesis on the Water by Excimer Laser Irradiation

Published online by Cambridge University Press:  10 February 2011

H. Hidai  and
H. Tokura
H. Hidai
Affiliation:
Department of Control and Systems Engineering, Tokyo Institute of Technology, 2-12-1 0- okayama, Meguro, Tokyo, JAPAN 152-8552, hidai@ctri.titech.ac.jp, htokura@ctrl.titech.ac.jp
H. Tokura
Affiliation:
Department of Control and Systems Engineering, Tokyo Institute of Technology, 2-12-1 0- okayama, Meguro, Tokyo, JAPAN 152-8552, hidai@ctri.titech.ac.jp, htokura@ctrl.titech.ac.jp
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Abstract

Water was used as a substrate and carbon films were obtained from methane gas on the water by ArF excimer laser. The film was analyzed by a SEM, elementary analysis, Raman spectrum and FT-IR. Moreover synthesized position of the film was studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 261
Copyright
Copyright © Materials Research Society 1999

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References

1. Shafeev, G. A., Autric, M. and Marine, W., Advanced Mat. for Optics and Electronics. 7, 249 (1997)Google Scholar
2. Yokoyama, H., Kishida, S. and Washio, K., Appl. Phys. Lett. 44, 755(1984).Google Scholar
3. Montgomery, R. K. and Mantei, T. D., Appl. Phys. Lett. 48, 493(1986).Google Scholar
4. Pease, R. W. B. and Gayon, A.G, The Idenlification of molecular spectra, 4th ed. (Chapman and Hall Ltd., New York, 1976), pp. 82–86.Google Scholar
5. Giver, Lawrence P., J. Quant. Spectrosc. Radiat. Transfer, 19, 311(1978).Google Scholar