Hostname: page-component-8448b6f56d-c4f8m Total loading time: 0 Render date: 2024-04-18T08:56:14.304Z Has data issue: false hasContentIssue false
  • English
  • Français

3D Photonic Structures by Sol-Gel Imprint Lithography

Published online by Cambridge University Press:  17 March 2011

Marc Verschuuren  and
Hans Van Sprang
Marc Verschuuren
Affiliation:
Philips Research, High Tech Campus 4 (mailstop 12), 5656 AE, Eindhoven, Netherlands
Hans Van Sprang
Affiliation:
Philips Research, High Tech Campus 4 (mailstop 12), 5656 AE, Eindhoven, Netherlands
Get access

Abstract

We present a new and relatively simple process to manufacture three-dimensional sub-micron structures over square centimeter areas using a soft stamp imprinting process. The room-temperature replication process shows excellent quality in transferring features directly into inorganic silica material with pattern distortion smaller than 0.03% over an area of 15×15mm2. Using a self assembly planarization method the imprinting process can be repeated to form three-dimensional structures. As a demonstration, a multilayer stack of four crossed gratings is shown.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1002: Symposium N – Printing Methods for Electronics, Photonics and Biomaterials , 2007 , 1002-N03-05
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Malkovaa, Natalia, Ning, C. Z., Phys. Rev. Lett. 87, 161113 (2005).Google Scholar
2. Umemori, Ken-ichi, Kanamori, Yoshiaki, Hanea, Kazuhiro, Appl. Phys. Lett. 89, 021102 (2006).Google Scholar
3. Kim, Sang Hoon, Lee, Ki-Dong, Kim, Ja-Yeon, Kwon, Min-Ki, Park, Seong-Ju, Nanotechnology 18, 055306 (2007)Google Scholar
4. McNab, Sharee J., Moll, Nikolaj, Vlasov, Yurii A., Optics Expr. 11, 2927 (2003)Google Scholar
5. Gralak, Boris, Dood, Michiel de, Tayeb, Gérard, Enoch, Stefan, Maystre, Daniel, Phys. Revf. B 67, 066601 (2003)Google Scholar
6. Odom, Teri W., Love, J. Christopher, Wolfe, Daniel B., Paul, Kateri E., Whitesides, George M., Langmuir 18, 5314 (2002)Google Scholar
7. Marzolin, Christian, Smith, Stephen P., Prentiss, Mara, Whitesides, George M., Adv. Mater. 10, No. 8, 571 (1998)Google Scholar
8. Schueller, Olivier J. A., Whitesides, George M., Rogers, John A., Meier, Martin, Dodabalapur, Ananth, Appl. Optics, 38, 5799 (1999)Google Scholar
9. Fleming, J. G., Lin, Shawn-Yu, Optics Lett. 24, 49 (1999)Google Scholar
10. Lin, S. Y., Fleming, J. G., Hetherington, D. L., Smith, B. K., Biswas, R., Ho, K. M., Sigalas, M. M., Zubrzycki, W., Kurtz, S. R., Bur, Jim, Nature 394, 251 (1998)Google Scholar
11. Xie, R., Karim, A., Douglas, J. F., Han, C. C., Weiss, R. A., Phys. Rev. Lett. 81, 1251 (1998)Google Scholar
12. Kim, Youn San, Lee, Hong h., Adv. Mater. 15, 332 (2003)Google Scholar