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3D Photonic Structures by Sol-Gel Imprint Lithography

Published online by Cambridge University Press:  17 March 2011

Marc Verschuuren
Affiliation:
Philips Research, High Tech Campus 4 (mailstop 12), 5656 AE, Eindhoven, Netherlands
Hans Van Sprang
Affiliation:
Philips Research, High Tech Campus 4 (mailstop 12), 5656 AE, Eindhoven, Netherlands
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Abstract

We present a new and relatively simple process to manufacture three-dimensional sub-micron structures over square centimeter areas using a soft stamp imprinting process. The room-temperature replication process shows excellent quality in transferring features directly into inorganic silica material with pattern distortion smaller than 0.03% over an area of 15×15mm2. Using a self assembly planarization method the imprinting process can be repeated to form three-dimensional structures. As a demonstration, a multilayer stack of four crossed gratings is shown.

Type
Research Article
Copyright
Copyright © Materials Research Society 2007

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