Skip to main content Accessibility help
×
Home

500 K operation AlGaN/GaN HFETs with a large current and a high breakdown voltage

  • Hiroshi Kambayashi (a1), Jiang Li (a2), Nariaki Ikeda (a3) and Seikoh Yoshida (a4)

Abstract

It is reported that we demonstrated a large current operation AlGaN/GaN HFET with a low-on state resistance and a high breakdown voltage operation at room temperature and 500 K. We developed our unique ohmic electrode using Ti/AlSi/Mo. In addition, we investigated the dependence between the distance from the gate electrode to the drain electrode and the off-state breakdown voltage. As a result, the breakdown voltage of a unit HFET was over 1100 V. Furthermore, on the large scale HFET with the gate width of 240 mm, the maximum drain current of over 50 A was obtained at room temperature and also, that of over 25 A was obtained at 500 K. The off-state breakdown voltage was obtained about 800 V at room temperature and about 600 V at 500 K, although Si-based FETs can not operate in such a high temperature.

Copyright

References

Hide All
[1] Chow, T.P., Tyagi, R.: IEEE Trans. Electron Devices, 41, (1994) 1481.
[2] Akutas, O., Fan, Z.F., Mohammad, S.N., Botchkarev, A.E., and Morkoc, H.: Applied Physics Letters, 69, (1996) 3872.
[3] Yang, W., Lu, J., Asifkhan, M., Adesida, I.: IEEE Trans. Electron Devices, 48, (2001) 581.
[4] Yoshida, S. and Suzuki, J.: Jpn J Appl. Phys. Lett., 38, (1999) 851.
[5] Yoshida, S., Li, J., Wada, T., and Takehara, H.: Proc. 15th ISPSD, (2003) 58.
[6] Yoshida, S. and Ishii, H.: Phys. Stat. Sol. (a), Vol.188, (2001) 243.
[7] Kumar, V., Zhor, L., Selvanathan, D., and Adesida, I.: Applied Physics, 92, (2002) 1712.
[8] Nakayama, T., Miyamoto, H., Ando, Y., Okamoto, Y., Inoue, T., Hataya, K., and Kuzuhara, M.: Applied Physics Letters, 85, (2004) 3775.

Keywords

500 K operation AlGaN/GaN HFETs with a large current and a high breakdown voltage

  • Hiroshi Kambayashi (a1), Jiang Li (a2), Nariaki Ikeda (a3) and Seikoh Yoshida (a4)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed