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0.5 MeV Submicron Ion Probe System for RBS/PIXE.

  • K. Inoue (a1), M. Takai (a2), K. IshibashI (a1), Y. Kawata (a1), N. Suzuki (a1) and S. Namba (a2)...

Abstract

A nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1μm.

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References

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13. Ishibashi, K., Inoue, K., Kawata, Y., Takai, M., and Namba, S., in preparation.

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