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Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure

Published online by Cambridge University Press:  11 July 2016

Yang Mu ,
Xiaoman Zhang ,
J.W. Hutchinson  and
W.J. Meng
Yang Mu
Affiliation:
Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, Louisiana 70803, USA
Xiaoman Zhang
Affiliation:
Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, Louisiana 70803, USA
J.W. Hutchinson
Affiliation:
School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA
W.J. Meng*
Affiliation:
Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, Louisiana 70803, USA
*
Address all correspondence to W.J. Meng at wmeng1@lsu.edu
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Abstract

Axial compression was conducted on micro-pillars, in which polycrystalline Cu thin films were sandwiched between CrN and Si. Plastic flow of Cu was achieved, when the Cu films are inclined either at 90° or 45° with respect to the pillar axis. The texture of Cu films was altered by changing the template on which film growth occurred. The Cu microstructure was further altered by post-deposition annealing. The flow stress shows little dependence on the film texture in the as-deposited state. However, annealing influences the flow stress of confined Cu films significantly. The implications on strain gradient plasticity models are discussed.

Type
Research Letters
Information
MRS Communications , Volume 6 , Issue 3 , September 2016 , pp. 289 - 294
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Copyright
Copyright © Materials Research Society 2016 

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