Advances in Chemical-Mechanical Planarization
Technical Feature
Research Article
Advances in Chemical-Mechanical Planarization
- Published online by Cambridge University Press: 31 January 2011, pp. 743-751
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Fundamentals of Slurry Design for CMP of Metal and Dielectric Materials
- Published online by Cambridge University Press: 31 January 2011, pp. 752-760
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Nanotopography Issues in Shallow Trench Isolation CMP
- Published online by Cambridge University Press: 31 January 2011, pp. 761-765
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Advances in Characterization of CMP Consumables
- Published online by Cambridge University Press: 31 January 2011, pp. 766-771
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Development and Application of an Abrasive-Free Polishing Solution for Copper
- Published online by Cambridge University Press: 31 January 2011, pp. 772-775
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Integration Challenges for CMP of Copper
- Published online by Cambridge University Press: 31 January 2011, pp. 776-778
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The Future of CMP
- Published online by Cambridge University Press: 31 January 2011, pp. 779-783
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Letter from the President
On to Boston
- Published online by Cambridge University Press: 31 January 2011, p. 733
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Research\Researchers
Bandgap Fluorescence of Carbon Nanotubes Observed
- Published online by Cambridge University Press: 31 January 2011, p. 734
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Research/Researchers
Alternative Fabrication Process for Nanostructured Alloys Promises Dramatic Cost Reduction
- Published online by Cambridge University Press: 31 January 2011, p. 734
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Research\Researchers
Dye-DNA-Lipid Thin Films Exhibit Durable Amplified Spontaneous Emission
- Published online by Cambridge University Press: 31 January 2011, p. 735
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DNA-Templated Nanowire Fabrication Technique Developed
- Published online by Cambridge University Press: 31 January 2011, pp. 735-736
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Direct Ink-Jet Printing Assembles ZrO2 Powder into 3D Shape
- Published online by Cambridge University Press: 31 January 2011, p. 736
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Simulations Show a Hexatic Phase in Porous Media
- Published online by Cambridge University Press: 31 January 2011, pp. 736-737
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Direct Observation of Intercalated Cs in Zeolite Si32O64 Yields Example of Inorganic Electride
- Published online by Cambridge University Press: 31 January 2011, p. 737
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Carbon-Nanotube Transistor Arrays Used for Fabrication of Multistage Complementary Logic Devices and Ring Oscillators
- Published online by Cambridge University Press: 31 January 2011, pp. 737-738
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AFM Enables Study of Biomolecules' Interaction with Minerals
- Published online by Cambridge University Press: 31 January 2011, p. 738
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Gradient Structures of Nanoparticles Prepared on Chemical Template
- Published online by Cambridge University Press: 31 January 2011, pp. 738-739
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Science Policy
Science Policy
- Published online by Cambridge University Press: 31 January 2011, pp. 740-741
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Resources
Resources
- Published online by Cambridge University Press: 31 January 2011, p. 742
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