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Stresses in Multilayered Thin Films

  • Robert C. Cammarata, John C. Bilello, A. Lindsay Greer, Karl Sieradzki and Steven M. Yalisove...

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Almost all thin films deposited on a substrate are in a state of stress. Fifty years ago pioneering work concerning the measurement of thin-film stresses was conducted by Brenner and Senderoff. They electroplated a metal film onto a thin metal substrate strip fixed at one end and measured the deflection of the free end of the substrate with a micrometer. Using a beam-bending analysis, they were able to calculate a residual stress from the measured deflection of the bimetallic film-substrate system. A variety of other, more sensitive methods of measuring the curvature of the surface of a film-substrate system have since been developed using, for example, capacitance measurements and interferometry techniques.

When a monochromatic x-ray beam is incident onto a curved single crystal, the diffraction condition is satisfied only for regions of the crystal where the inclination angle with respect to the incident beam exactly matches the Bragg angle. When a parallel beam plane-wave source is used, the diffracted beam from a particular set of (hkl) planes gives rise to a single narrow-contour band. If the crystal is rocked by an angle ω, the contour band will move by a certain distance D. The radius of curvature R of the crystal lattice planes is given by

where θ is the Bragg angle. Equal rocking angles produce equivalent D values for uniform curvature, or varied D values for nonuniform curvature. Using this procedure, detailed contour maps of the angular displacement field of the crystal can be mapped in two dimensions.

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1.Hoffman, R.W., in Physics of Thin Films, vol. 3, edited by Hass, G. and Thun, R.E. (Academic Press, New York, 1966) p. 211.
2.Thornton, J.A., Tabock, J., and Hoffman, D.W., Thin Solid Films 64 (1979) p. 111.
3.Doerner, M.F. and Nix, W.D., CRC Critical Rev. Solid State Mater. Sci. 14 (1988) p. 225.
4.Windischmann, H., CRC Critical Rev. Solid State Mater. Sci. 17 (1992) p. 547.
5.Parfitt, L.J., Rek, Z.U., Yalisove, S.M., and Bilello, J.C., in Thin Films-Structure and Morphology, edited by Moss, S.C., Ila, D., Cammarata, R.C., Chason, E.H., Einstein, T.L., and Williams, E.D. (Mater. Res. Soc. Symp. Proc. 441, Pittsburgh, 1997) p. 385.
6.Brenner, A. and Senderoff, S., J. Res. Natl. Bur. Stand. 42 (1949) p. 105.
7.Fingan, J.D. and Hoffman, R.W., in 8th Natl. Symp. on Vacuum Technology Transactions (Pergamon Press, New York, 1961) p. 935.
8.Hoffman, D.W. and Kukla, C.M., J. Vac. Sci. Technol. A 3 (1985) p. 2600.
9.Flinn, P.A., Gardner, D.S., and Nix, W.D., IEEE Trans. Electron. Devices 34 (1987) p. 689.
10.Nix, W.D., Metall. Trans. A 20 (1989) p. 2217.
11.Volkert, C.A., J. Appl. Phys. 70 (1991) p. 3521.
12.Renniger, M., Phys. Lett. 1 (1962) p. 104.
13.Renniger, M., Z. Phys. 19 (1965) p. 20.
14.Bonse, U. and Hart, M., Z. Phys. 18 (1965) p. 154.
15.Bonse, U. and Hart, M., Acta Crystallogr Sec. A 24 (1968) p. 240.
16.Kuo, C.L., Emamian, M., and Bilello, J.C., Rev. Sci. Instrum. 55 (1984) p. 107.
17.Kuo, C.L., Vanier, P.E., and Bilello, J.C., J. Appl. Phys. 55 (1984) p. 375.
18.Tao, J., Lee, L.H., and Bilello, J.C., J. Electron. Mater. 20 (1991) p. 819.
19.Floro, J.A., Chason, E., Lee, S.R., Twesten, R.D., Hwang, R.Q., and Freund, L.B., J. Electron. Mater. 26 (1997) p. 969.
20.Zhao, Z.B., Hershberger, J., Yalisove, S.M., and Bilello, J.C., in Thin Films: Stresses and Mechanical Properties VII, edited by Cammarata, R.C., Busso, E.P., Nastasi, M.A., and Oliver, W.C. (Mater. Res. Soc. Symp. Proc. 505, Warrendale, PA, 1998) p. 519.
21.Parfitt, L.J., PhD thesis, University of Michigan, 1997.
22.Keller, R.R., Maier, H.J., Renner, H., Mughrabi, H., and Preston, A., Philos. Mag. 74 (1996) p. 23.
23.Marra, W.C., Eisenberger, P., and Cho, A.Y., J. Appl. Phys. 50 (1979) p. 6947.
24.Noyan, I.C. and Cohen, J.B., Residual Stress: Measurement by Diffraction and Interpretation (Springer-Verlag, New York, 1987).
25.Feidenhans'l, R., Surf. Sci. Rep. 10 (1989) p. 105.
26.Fuossa, P.H. and Brennan, S., Annu. Rev. Mater. Sci. 20 (1990) p. 365.
27.Cui, S.F., Mai, Z.H., Wu, L.S., Wang, C.Y., and Dai, D.Y., Rev. Sci. Instrum. 62 (1991) p. 2419.
28.Doerner, M.F. and Brennan, S., J. Appl. Phys. 63 (1988) p. 126.
29.Toney, M.F. and Brennan, S., Phys. Rev. B 39 (1989) p. 7963.
30.Bain, J.A., Chyung, L.J., Brennan, S., and Clemens, B.M., Phys. Rev. B 44 (1991) p. 1184.
31.Clemens, B.M. and Bain, J.A., MRS Bulletin XVII (7) (1992) p. 46.
32.Noyan, I.C., Huang, T.C., and York, B.R., CRC Critical Rev. Solid State Mater. Sci. 20 (1995) p. 125.
33.Malhotra, S. G., Rek, Z.U., Yalisove, S.M., and Bilello, J.C., J. Appl. Phys. 79 (1996) p. 6872.
34.Malhotra, S. G., Rek, Z.U., Yalisove, S.M., and Bilello, J.C., Thin Solid Films 301 (1997) p. 45.
35.Malhotra, S. G., Rek, Z.U., Yalisove, S.M., and Bilello, J.C., Thin Solid Films 301 (1997) p. 55.
36.Hershberger, J., Rek, Z.U., Kustas, F., Yalisove, S.M., and Bilello, J.C. in Applications of Synchrotron Radiation Techniques to Materials Science, edited by Mini, S.M., Stock, S.R., Perry, D.L., and Terminello, L.J. (Mater. Res. Soc. Symp. Proc. 524, Warrendale, PA, 1998) p. 109.
37.Whitacre, J.F., Rek, Z.U., Yalisove, S.M., and Bilello, J.C., in Applications of Synchrotron Radiation Techniques to Materials Science, edited by Mini, S.M., Stock, S.R., Perry, D.L., and Terminello, L.J. (Mater. Res. Soc. Symp. Proc. 524, Warrendale, PA, 1998) p. 115.
38.Johnson, W.C., Metall. Trans. A 18 (1987) p. 1093.
39.Johnson, W.C. and Voorhees, P.W., Metall. Trans. A 18 (1987) p. 1213.
40.Johnson, W.C., in Multilayers: Synthesis, Properties, and Non-Electronic Applications, edited by Barbee, T.W. Jr., Spaepen, F., and Greer, L. (Mater. Res. Soc. Symp. Proc. 103, Pittsburgh, 1988) p. 61.
41.Gibbs, J.W., The Scientific Papers of J. Willard Gibbs, vol. 1 (Longmans-Green, London, 1906) p. 55.
42.Shuttleworth, R., Proc. Phys. Soc. London, Sect. A 63 (1950) p. 445.
43.Herring, C., in The Physics of Powder Metallurgy, edited by Kingston, W.E. (McGraw-Hill, New York, 1951) p. 143.
44.Cahn, J.W., Acta Metall. 28 (1980) p. 1333.
45.Cammarata, R.C., Prog. Surf. Sci. 46 (1994) p. 1.
46.Brooks, H., in Metal Interfaces (American Society for Metals, Metals Park, OH, 1963) p. 20.
47.Cahn, J.W. and Larché, F., Acta. Metall. 30 (1982) p. 51.
48.Cammarata, R.C. and Sieradzki, K., Phys. Rev. Lett. 62 (1989) p. 2005.
49.Kosevich, Yu.A. and Kosevich, A.M., Solid State Commun. 70 (1989) p. 541.
50.Streitz, F.H., Cammarata, R.C., and Sieradzki, K., Phys. Rev. B 49 (1994) p. 10707.
51.Shull, A.L. and Spaepen, F., J. Appl. Phys. 80 (1996) p. 6243.
52.Barnett, S.A. and Shinn, M., Annu. Rev. Mater. Sci. 24 (1994) p. 481.
53.Cammarata, R.C., Thin Solid Films 248 (1994) p. 82.
54.Was, G.S. and Foecke, T., Thin Solid Films 286 (1996) p. 1.
55.Cammarata, R.C., in Handbook of Thin Film Process Technology, edited by Glocker, D. and Shah, S.I. (Institute of Physics, Bristol, 1998) p. F2.
56.Wonnell, S.K., Delaye, J.M., Bibolé, M., and Limoge, Y., J. Appl. Phys. 72 (1992) p. 5195.
57.Prokes, S.M., Glembocki, O.J., and Godbey, D.J., Appl. Phys. Lett. 60 (1992) p. 1087.
58.Prokes, S.M. and Wang, K.L., Appl. Phys. Lett. 56 (1990) p. 2628.
59.Stephenson, G.B., Acta Metall. 36 (1988) p. 2663.
60.Darken, L.S., Trans. Metall. Soc. AIME 175 (1948) p. 184.
61.Greer, A.L., Defect Diff. Forum 129–130 (1996) p. 163.
62.Karpe, N., Bøttiger, J., Krog, J.P., Conyers, J.S., Greer, A.L., and Somekh, R.E., Philos. Mag. A75 (1997) p. 461.
63.Conyers, J.S., Hall, M.J., Greer, A.L., and Somekh, R.E., J. Magn. Magn. Mater. 156 (1996) p. 419.

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Stresses in Multilayered Thin Films

  • Robert C. Cammarata, John C. Bilello, A. Lindsay Greer, Karl Sieradzki and Steven M. Yalisove...

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