Skip to main content Accessibility help
×
Home

Fundamentals of Secondary Ion Mass Spectrometry

  • W. Katz and J.G. Newman

Abstract

This article presents an overview of our current understanding of the fundamental factors underlying Secondary Ion Mass Spectrometry (SIMS). Included is a discussion of the sputtering process and possible mechanisms which produce ejected ions. Presently available instrumentation for SIMS analysis is discussed and some examples of SIMS analysis are also given.

Copyright

References

Hide All
1.Williams, P., Appl. Surf. Sci. 1 (1982), p. 3, 241.
2.Winters, H.F., Radiat. Eff. 64 (1982) p. 79.
3.Hart, R.G. and Cooper, C.B., Surf. Sci. 94 (1980) p. 105.
4.Harrison, D.E. Jr., Kelly, P.W., Garrison, B.J., and Winograd, N., Surf. Sci. 76 (1978) p. 311.
5.Winograd, N., Garrison, B.J., and Harrison, D.E. Jr., Phys. Rev. Lett. 41 (1978) p. 1120.
6.Harrison, D.E. Jr., Moore, W.L., and Holcombe, H.T., Radiat. Eff. 17 (1973) p. 167.
7.Hofer, W.O., Radiat. Eff. 19 (1973) p. 263.
8.Woodyard, J.R. and Cooper, C.B., J. Appl. Phys. 35 (1964) p. 1107.
9.Joyes, P., J. of Phys. B: Atomic Molec. Phys. 4 (1971) p. L15.
10.Slodzian, G., Surf. Sci. 48 (1975) p. 161.
11.Andersen, C.A., Int. J. Mass. Spec. Ion Phys. 3 (1970) p. 413.
12.der Weg, W.F. Van and Bierman, D.J., Physica 44 (1969) p. 206.
13.Thomas, G.E., Radiat. Eff. 31 (1977) p. 185.
14.Williams, P. and Evans, C.A. Jr., Surf. Sci. 78 (1978) p. 324.
15.Storms, H.A., Brown, K.F., and Stein, J.D., Anal. Chem. 49 (1977) p. 2023.
16.Deline, V.R., Katz, W., Evans, C.A. Jr., and Williams, P., Appl. Phys. Lett. 33 (1978) p. 832.
17.Williams, P., Lewis, R.K., Evans, C.A. Jr., and Hanley, P.R., Anal. Chem. 49 (1977) p. 1399.
18.Storms, H.A., Brown, K.F., and Stein, J.D., Anal. Chem. 49 (1977) p. 2023.
19.Valyi, L., Atom and Ion Sources (John Wiley and Sons, London, 1977) p. 138, and references therein.
20.Prewett, P.D., Jefferies, D.K., and McMillan, D.J., Vacuum 34 (1984) p. 107.
21.Waugh, A.R., Bayly, A.R., and Anderson, K., Vacuum 34 (1984) p. 103.
22.White, F.A. and Wood, G.M., Mass Spectrometry (John Wiley and Sons, New York, 1986) p. 51.
23. References found in Secondary Ion Mass Spectrometry SIMS II-V, edited by Benninghoven, A. (Springer-Verlag, New York, 19791985).
24.Phillips, B.F., Burkman, D.C., Schmidt, W.R., and Peterson, C.A., J. Vac. Sci. Technol. A, 1 (1983) p. 646.
25.Barocela, E., J. Vac. Sci. Technol. A, 4 (1986) p. 1893.
26.Andersen, C.A., Hinthorne, J.R., and Fredrickson, K., Proceedings of the Apollo 11 Lunar Sci. Conf. 1 (1970) p. 159.
27.Valenty, S.J., Chera, J.J., Olson, D.R., Webb, K.K., Smith, G.A., and Katz, W., J. Am. Chem. Soc. 106 (1984) p. 6155.
28.Burns, M.S., Proceeding of the Fifth International SIMS Conference 44 (1985) p. 426.

Fundamentals of Secondary Ion Mass Spectrometry

  • W. Katz and J.G. Newman

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed