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Fundamentals of Secondary Ion Mass Spectrometry

  • W. Katz and J.G. Newman


This article presents an overview of our current understanding of the fundamental factors underlying Secondary Ion Mass Spectrometry (SIMS). Included is a discussion of the sputtering process and possible mechanisms which produce ejected ions. Presently available instrumentation for SIMS analysis is discussed and some examples of SIMS analysis are also given.



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Fundamentals of Secondary Ion Mass Spectrometry

  • W. Katz and J.G. Newman


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