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Fundamentals of Secondary Ion Mass Spectrometry

Published online by Cambridge University Press:  29 November 2013

W. Katz  and
J.G. Newman
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Abstract

This article presents an overview of our current understanding of the fundamental factors underlying Secondary Ion Mass Spectrometry (SIMS). Included is a discussion of the sputtering process and possible mechanisms which produce ejected ions. Presently available instrumentation for SIMS analysis is discussed and some examples of SIMS analysis are also given.

Type
Materials Microanalysis
Information
MRS Bulletin , Volume 12 , Issue 6 , September 1987 , pp. 40 - 47
Copyright
Copyright © Materials Research Society 1987

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