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Study of nanostructured HfN coatings using layers arrangement

  • L. García González (a1), S.R. Vásquez García (a2), D.J. Araujo-Pérez (a1), A. K. García Rueda (a1), L. Zamora Peredo (a1), N. Flores Ramírez (a3), L. Domratcheva Lvova (a3), T. Hernández Quiroz (a1) and J. Hernández Torres (a1)...

Abstract

In the present investigation, nanostructured ceramic HfN coatings were deposited onto silicon (100) wafer by magnetron sputtering DC method, from a metallic Hf target. The deposition process followed by a similar pattern as the multilayer film deposition, using cycles with the nitrogen gas turned on for 90 s and turned off for 15 s; four sets of samples were obtained using 5, 10, 15 and 20 cycles. The X ray diffraction (XRD) identified the presence of two different cubic crystalline phases of HfN, corroborated by Rietveld analysis. The Vickers hardness test showed that the hardness values increases with more cycles, due to a higher compressive stress evaluated by Stoney formula. All samples were investigated with no visible fracture until 10 grf for the 5 cycles sample; however, no fractures were visible at all for the 15 and 20 cycle samples for that given load, instead fractures started to appear at 25grf for the 10 and 15 cycles coating. Eventually it is distinguished that, the thickness and morphology of the coatings were measured by field emission scanning electron microscopy FE-SEM. As well as, the thickness increased from 0.4 µm to almost 1.33 µm as the number of cycles also increased, where we can observe the formation of columnar growth, moreover it is possible to distinguish the formation of two different clusters which might be related to different phases.

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