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Fatigue behavior of nanoscale Mo/W multilayers on flexible substrates

  • Fang Wang (a1) (a2), Xue-Mei Luo (a1), Dong Wang (a3), Peter Schaaf (a3) and Guang-Ping Zhang (a1)...

Abstract

Fatigue properties of Mo/W multilayers with individual layer thickness (λ) of 5, 20, 50 and 100 nm on flexible polyimide substrates were investigated. The experimental results show that the fatigue resistance increases with decreasing λ from 100 nm to 20 nm, and reaches the maximum at λ=20 nm, and then decreases when further decreasing λ. Fatigue cracks of Mo/W multilayers with different λ were found to propagate along columnar grain boundary in the out-of-plane direction and along the boundary of cluster structures. The enhanced fatigue resistance is attributed to the larger cluster inclination angles and the more tortuous in-plane cracking paths.

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Corresponding author

*Corresponding authors. E-mails: xmluo@imr.ac.cn, gpzhang@imr.ac.cn

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