Skip to main content Accessibility help
×
Home

Alternative simple method to realize p-type BaSi2 thin films for Si heterojunction solar cell applications

  • Kazuma Takahashi (a1), Yoshihiko Nakagawa (a1), Kosuke O. Hara (a2), Isao Takahashi (a1), Yasuyoshi Kurokawa (a1) and Noritaka Usami (a1)...

Abstract:

A novel preparation method of B-doped p-type BaSi2 (p-BaSi2) is proposed to realize heterojunction crystalline Si solar cells with p-BaSi2. The method consists of thermal evaporation of BaSi2 on B-doped amorphous Si (a-Si). In this study, the effect of a-Si interlayers and substrate temperature during BaSi2 evaporation on the electrical characteristics and crystalline quality of the evaporated films were investigated. While no cracks were found in the BaSi2 films formed using hydrogenated a-Si deposited by plasma enhanced chemical vapor deposition (PECVD), the films formed with sputtered a-Si have cracks. In addition, BaSi2 films formed with a 600 °C substrate temperature using PECVD a-Si showed p-type characteristics. After a post-deposition anneal at 800 °C for 5 minutes, the film hole density was measured at 1.3×1019 cm-3 and boron was found to be uniformly distributed throughout the film. These results show that the proposed method using PECVD is promising to obtain p-BaSi2 thin films with high hole density for p-BaSi2/n-type crystalline Si heterojunction solar cells.

Copyright

Corresponding author

References

Hide All
1.Niu, G., Guo, X. and Wang, L., J. Mater. Chem. A, 3, 8970 (2015).
2.Friedlmeier, T. M., Jackson, P., Bauer, A., Hariskos, D., Kiowski, O., Menner, R., Wuerz, R. and Powalla, M., Thin Solid Films 633, 363 (2006).
3.Gloeckler, M., Sankin, I., and Zhao, Z., IEEE J. Photovol. 3, 4 (2013).
4.Morita, K., Inomata, Y., Suemasu, T., Thin Solid Films 508, 363 (2006).
5.Toh, K., Saito, T., Suemasu, T., Jpn. J. Appl. Phys. 50, 068001 (2011).
6.Kumar, M., Umezawa, N., Imai, M., Appl. Phys. Express 7, 071203 (2014).
7.Hara, K. O., Usami, N., Toh, K., Baba, M., Toko, K., and Suemasu, T., J. Appl. Phys. 112, 083108 (2012).
8.Hara, K. O., Usami, N., Nakamura, K., Takabe, R., Baba, M., Toko, K., and Suemasu, T., Appl. Phys. Express 6, 112302 (2013).
9.Toh, K., Saito, T., and Suemasu, T., Jpn. J. Appl. Phys., Part 1 50, 068001 (2011).
10.Kumar, M., Umezawa, N., and Imai, M., J. Appl. Phys. 115, 203718 (2014).
11.Sueamsu, T., Jpn. J. Appl. Phys., Part 1 54, 07JA01 (2015).
12.Takahashi, K, Nakagawa, Y., Hara, K. O., Kurokawa, Y., and Usami, N., Jap. J. Appl. Phys. 56, 05DB05 (2017).
13.Varache, R., Leendertz, C., Gueunier-Farret, M. E., Haschke, J., Muñoz, D., and Korte, L., Sol. Energy Mater. Sol. Cells 141, 14 (2015).
14.Suemasu, T., Morita, K., Kobayashi, M., Saida, M., and Sasaki, M., Jpn. J. Appl. Phys. 45, L519 (2015).
15.Yachi, S., Takabe, R., Takeuchi, H., Toko, K., Suemasu, T., Appl. Phys. Lett. 109, 072103 (2016).
16.Khan, M. A., Hara, K. O., Du, W., Baba, M., Nakamura, K., Suzuno, M., Toko, K., Usami, N., and Suemasu, T., Appl. Phys. Lett. 102, 112107 (2013).
17.Kobayashi, M., Matsumoto, Y., Ichikawa, Y., Tsukada, D., and Suemasu, T., Appl. Phys. Express 1, 051403 (2008).
18.Takeishi, M., Matsumoto, Y., Sasaki, R., Saito, T., and Suemasu, T., Procedia Eng. 11, 27 (2011).
19.Hara, K. O., Usami, N., Hoshi, Y., Shiraki, Y., Suzuno, M, Toko, K., and Suemasu, T., Jpn. J. Appl. Phys. 50, 121202 (2011).
20.Khan, M. A., Hara, K. O., Nakamura, K., Du, W., Baba, M., Toh, K., Suzuno, M., Toko, K., Usami, N., and Suemasu, T., J. Cryst. Growth 378, 201 (2013).
21.Khan, M. A., Nakamura, K., Du, W., Toko, K., Usami, N., and Suemasu, T., Appl. Phys. Lett. 104, 252104 (2014).
22.Deng, T., Gotoh, K., Takabe, R., Xu, Z., Yachi, S., Yamashita, Y., Toko, K., Usami, N., Suemasu, T., Cryst, J.. Growth 475, 186 (2017).
23.Khan, M. A, Takeishi, M., Matsumoto, Y., Saito, T., Suemasu, T., Physics Procedia 11 11 (2011).
24.Tsukada, D., Matsumoto, Y., Sasaki, R., Takeishi, M., Saito, T, Usami, N., Suemasu, T., J. Cryst. Growth 311, 14 (2009).
25.Kobayashi, M., Matsumoto, Y., Ichikawa, Y., Tsukada, D., and Suemasu, T., Appl. Phys. Express 1, 051403 (2008).
26.Kobayashi, M, Morita, K, Suemasu, T, Thin Solid Films 515 8242 (2007).
27.Nakagawa, Y., Hara, K. O., Suemasu, T., and Usami, N., Jpn. J. Appl. Phys. 54, 08KC03 (2015).
28.Hara, K. O., Nakagawa, Y., Suemasu, T., and Usami, N., Jpn. J. Appl. Phys. 54, 07JE02 (2015).
29.Hara, K.O., Yamanaka, J., Arimoto, K., Nakagawa, K., Suemasu, T., and Usami, N., Thin Solid Films 595, 68 (2015).
30.Hara, K. O., Nakagawa, Y., Suemasu, T., and Usami, N., Procedia Eng. 141, 27 (2016).
31.Hara, K. O., Trinh, C. T., Arimoto, K., Yamanaka, J., Nakagawa, K., Kurokawa, Y., Suemasu, T., and Usami, N. J. Appl. Phys. 120, 045103 (2016).
32.Suhara, T., Murata, K., Navabi, A., Hara, Kosuke O., Nakagawa, Y., Trinh, C. T., Kurokawa, Y, Suemasu, T., Wang, K. L., and Usami, N., Jap. J. Appl. Phys. 56, 05DB05 (2017).
33.Somer, M., Anorg, Z.. Allg. Chem. 626, 2478 (2000).
34.Sriraman, S., Agarwal, S., Aydil, E. S. and Maroudas, D., Nature 418, 00866 (2002).

Keywords

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed