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Reliability of the Properties of (Pb,La)(Zr,Ti)O3 Capacitors with Non–noble Metal Oxide Electrodes stored in an H2 Atmosphere

Published online by Cambridge University Press:  19 February 2016


Yoko Takada
Affiliation:
Department of Chemical Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
Naoki Okamoto
Affiliation:
Department of Chemical Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
Takeyasu Saito
Affiliation:
Department of Chemical Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
Kazuo Kondo
Affiliation:
Department of Chemical Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
Takeshi Yoshimura
Affiliation:
Department of Physics and Electronics, Osaka Prefecture University, Sakai 599-8531, Japan
Norifumi Fujimura
Affiliation:
Department of Physics and Electronics, Osaka Prefecture University, Sakai 599-8531, Japan
Koji Higuchi
Affiliation:
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki 567-0047, Japan
Akira Kitajima
Affiliation:
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki 567-0047, Japan
Rie Shishido
Affiliation:
Institute of Multidisciplinary Research for Advances Materials, Tohoku University, Sendai 980-8577, Japan
Corresponding

Abstract

We fabricated ferroelectric (Pb,La)(Zr,Ti)O3 (PLZT) capacitors with Sn:In2O3 (ITO) or Pt top electrodes and investigated the ferroelectric properties of these PLZT capacitors. The shape of polarization–voltage hysteresis loops was essentially unchanged and the decrease in the remnant polarization of the ITO/PLZT/Pt capacitors was smaller than that of the Pt/PLZT/Pt capacitors after annealing with 3% D2 (in N2) at 200°C and 1 Torr (i.e., FGAD). Time of flight secondary mass spectrometry revealed that the D atoms were incorporated into the PLZT film of the Pt/PLZT/Pt capacitors after 3% D2 annealing, resulting in a decrease in the ferroelectric properties. In comparison, no D ion signal was detected in the PLZT film after FGAD for ITO/PLZT/Pt capacitors.


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Copyright
Copyright © Materials Research Society 2016 

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Reliability of the Properties of (Pb,La)(Zr,Ti)O3 Capacitors with Non–noble Metal Oxide Electrodes stored in an H2 Atmosphere
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