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Z-contrast STEM Imaging of Dopant Sites in a Silicon Nitride Intergranular Film

Published online by Cambridge University Press:  01 August 2004

Naoya Shibata ,
G S Painter ,
P F Becher  and
S J Pennycook
Naoya Shibata
Affiliation:
Oak Ridge National Laboratory JSPS Research Fellow
G S Painter
Affiliation:
Oak Ridge National Laboratory
P F Becher
Affiliation:
Oak Ridge National Laboratory
S J Pennycook
Affiliation:
Oak Ridge National Laboratory
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 270 - 271
Copyright
© 2004 Microscopy Society of America

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