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Xe Plasma FIB-SEM with Improved Resolution of Both Ion and Electron Columns

Published online by Cambridge University Press:  23 September 2015

J. Jiruse ,
M. Havelka ,
J. Polster  and
T. Hrncif
J. Jiruse
Affiliation:
TESCAN Brno, s.r.o., Brno, Czech Republic
M. Havelka
Affiliation:
TESCAN Brno, s.r.o., Brno, Czech Republic
J. Polster
Affiliation:
TESCAN Brno, s.r.o., Brno, Czech Republic
T. Hrncif
Affiliation:
TESCAN Brno, s.r.o., Brno, Czech Republic

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1995 - 1996
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Hrncif, T, et al, Proceedings of 38th Int. Symp. for Testing and Failure Analysis ISTFA (2012) 26.Google Scholar
[2] Delobbe, A, et al, Microsc. and Microanal 20 (2014) 298.CrossRefGoogle Scholar
[3] Hrncif, T, et al, Microsc. and Microanal 19(Suppl 2 (2013) 860.CrossRefGoogle Scholar
[4] Jiruse, J, et al, Microsc. Microanal. 18(Suppl 2 (2012) 638.Google Scholar
[5] Jiruse, J, et al, Journal of Vac. Sci. Technol. B 32 (2014) 06FC03.CrossRefGoogle Scholar
[6] The research leading to these results has received funding from the European Union 7th Framework Program [FP7/2007-2013] under grant agreement n°280566, project UnivSEM..Google Scholar