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A Wide Area Scanning Atomic Force Profiler

Published online by Cambridge University Press:  01 August 2004

A D Batchelor ,
Brian Galhouse ,
Dieter P Griffis ,
Fred A Stevie  and
Phillip E Russell
A D Batchelor
Affiliation:
North Carolina State University
Brian Galhouse
Affiliation:
KLA Tencor, Manassas, Virginia
Dieter P Griffis
Affiliation:
North Carolina State University
Fred A Stevie
Affiliation:
North Carolina State University
Phillip E Russell
Affiliation:
North Carolina State University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1106 - 1107
Copyright
© 2004 Microscopy Society of America

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