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When is Si3N4 not Si3N4? When it is a Low Stress SiNx Membrane Window

Published online by Cambridge University Press:  23 September 2015

Nestor J. Zaluzec
Nestor J. Zaluzec*
Affiliation:
Electron Microscopy Center, NST Div, Argonne National Laboratory, Argonne, Il, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 959 - 960
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Research supported by the U.S. DoE, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357 at the Electron Microscopy Center , NST Division of ANL.Google Scholar