Hostname: page-component-77c89778f8-vpsfw Total loading time: 0 Render date: 2024-07-20T19:05:51.581Z Has data issue: false hasContentIssue false
  • English
  • Français

Using a Plasma FIB Equipped with Xe, N2, O2 and Ar for Atom Probe Sample Preparation – Ion Implantation and Success Rates

Published online by Cambridge University Press:  05 August 2019

Katja Eder ,
Vijay Bhatia ,
Brandon Van Leer  and
Julie M. Cairney
Katja Eder*
Affiliation:
Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, Australia.
Vijay Bhatia
Affiliation:
Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, Australia.
Brandon Van Leer
Affiliation:
Thermo Fisher Scientific 5350 NE Dawson Creek Drive, Hillsboro OR, USA.
Julie M. Cairney
Affiliation:
Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, Australia.
*
*Corresponding author: katja.eder@sydney.edu.au

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Recent Developments in Atom Probe Tomography
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 316 - 317
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Tesch, P et al. , in “ISTFA 2008: Conference Proceedings from the 34th International Symposium for Testing and Failure Analysis”, ed. (ASM International, Materials Park) p. 7.Google Scholar
[2]Gault, B et al. , in “Atom Probe Microscopy”, (Springer, New York).Google Scholar
[3]Ziegler, JF, Ziegler, MD and Biersack, JP, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 268 (2010), p. 1818.Google Scholar