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Using a Plasma FIB Equipped with Xe, N2, O2 and Ar for Atom Probe Sample Preparation – Ion Implantation and Success Rates

  • Katja Eder (a1), Vijay Bhatia (a1), Brandon Van Leer (a2) and Julie M. Cairney (a1)
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Copyright

Corresponding author

*Corresponding author: katja.eder@sydney.edu.au

References

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[1]Tesch, P et al. , in “ISTFA 2008: Conference Proceedings from the 34th International Symposium for Testing and Failure Analysis”, ed. (ASM International, Materials Park) p. 7.
[2]Gault, B et al. , in “Atom Probe Microscopy”, (Springer, New York).
[3]Ziegler, JF, Ziegler, MD and Biersack, JP, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 268 (2010), p. 1818.

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