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Ultra-Transparent Atomic Layer Deposition Membranes for Liquid Cell TEM

Published online by Cambridge University Press:  22 July 2022

Rohan Dhall ,
Michael J. Elowson ,
Adam Schwartzberg ,
Sardar B. Alam ,
Stephanie Y. Chang ,
Vittoria Tommasini ,
Arian Gashi ,
Emory M. Chan ,
Stefano Cabrini  and
Shaul Aloni
Rohan Dhall*
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Michael J. Elowson
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Adam Schwartzberg
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Sardar B. Alam
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Stephanie Y. Chang
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Vittoria Tommasini
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Arian Gashi
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Emory M. Chan
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Stefano Cabrini
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
Shaul Aloni
Affiliation:
Molecular Foundry, Lawrence Berkeley National Lab, Berkeley, CA, USA
*
*Corresponding author: rdhall@lbl.gov

Abstract

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Type
In Situ TEM Characterization of Dynamic Processes During Materials Synthesis and Processing
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 1824 - 1826
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Copyright
Copyright © Microscopy Society of America 2022

References

Ross, FM in “Liquid cell electron microscopy” (Cambridge University Press).CrossRefGoogle Scholar
Yuk, JM et al. , Science 336(6077) (2012), p.61.CrossRefGoogle Scholar
Elowson, MJ et al. , Journal of Vacuum Science & Technology B 40(2) (2022), p.023001.CrossRefGoogle Scholar
Zhang, Y et al. , Chemistry of Materials 29(24) (2017), p.10518.CrossRefGoogle Scholar
Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231, as well as the Materials Sciences and Engineering Division of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231 within the in situ TEM program (No. KC22ZH).Google Scholar