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UHV ENFINA - A New High-Performance EELS Spectrometer for the VG STEM

Published online by Cambridge University Press:  02 July 2020

John A. Hunt ,
Frank E. Dickerson ,
A. Abbott ,
Gabriel Szantai  and
Paul E. Mooney
John A. Hunt
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
Frank E. Dickerson
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
A. Abbott
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
Gabriel Szantai
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
Paul E. Mooney
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
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Abstract

The Gatan Enfina EELS spectrometer, featuring a new generation of detection system, was recently developed to upgrade or replace Gatan PEELS / DigiPEELS systems. Major advantages of the system include significant improvements to the detector point spread function, readout speed, sensitivity, readout noise, and increased number of detection channels. This design was until now not available for VG STEM systems because compatible detectors must not significantly degrade the UHV column vacuum and must survive column baking. in this abstract we report on a new detector system with comparable specifications to the standard Enfina system but designed for new or for upgrading existing Gatan UHV PEELS / DigiPEELS systems on the VG STEM.

The standard Enfina design has the scintillator, fibers, CCD, CCD socket board, flex-cables, thermo electric cooler and coupling grease in the shared vacuum of the EELS spectrometer and the electron microscope.

Type
EELS Microanalysis At High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1132 - 1133
Copyright
Copyright © Microscopy Society of America 2001

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References

references

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