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Two Methods for Measuring Lamellae Thicknesses In situ for Improved FIB Specimen Preparation

Published online by Cambridge University Press:  05 August 2019

Alexander Rakowski ,
Evan Tillotson ,
Aidan Rooney  and
Sarah Haigh
Alexander Rakowski
Affiliation:
Department of Chemistry, University of California Irvine, Irvine, CA, USA. School of Materials, University of Manchester, Manchester, UK.
Evan Tillotson
Affiliation:
School of Materials, University of Manchester, Manchester, UK.
Aidan Rooney*
Affiliation:
CEA Leti, Grenoble, France.
Sarah Haigh*
Affiliation:
School of Materials, University of Manchester, Manchester, UK.
*
*Corresponding authors: Aidan.Rooney@cea.fr and Sarah.Haigh@manchester.ac.uk
*Corresponding authors: Aidan.Rooney@cea.fr and Sarah.Haigh@manchester.ac.uk

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 858 - 859
Copyright
Copyright © Microscopy Society of America 2019 

References

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