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Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

Published online by Cambridge University Press:  09 October 2013

S. Yazdi ,
T. Kasama ,
D.W. McComb ,
A.C. Harrison  and
R.E. Dunin-Borkowski
S. Yazdi
Affiliation:
T. Kasama
Affiliation:
D.W. McComb
Affiliation:
A.C. Harrison
Affiliation:
R.E. Dunin-Borkowski
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1358 - 1359
Copyright
Copyright © Microscopy Society of America 2013