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Towards Atomic-Scale Fabrication in Silicon

Published online by Cambridge University Press:  01 August 2018

Bethany M. Hudak ,
Stephen Jesse ,
Jiaming Song ,
Albina Borisevich ,
Paul C. Snijders ,
Sergei V. Kalinin  and
Andrew R. Lupini
Bethany M. Hudak
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Stephen Jesse
Affiliation:
The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA The Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Jiaming Song
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Albina Borisevich
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Paul C. Snijders
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Sergei V. Kalinin
Affiliation:
The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA The Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Andrew R. Lupini
Affiliation:
The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 158 - 159
Copyright
© Microscopy Society of America 2018 

References

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[8] This research was partially (B.M.H., J.S., P.C.S) supported by the Laboratory Directed Research and Development program of the Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the U.S. Department of Energy. Part of this work (S.J., S.V.K.) was supported by the Center for Nanophase Materials Sciences, which is a US DOE Office of Science User Facility. A.B. and A.R.L. were supported by the U.S. Department of Energy, Office of Science, Basic Energy Sciences, Division of Materials Science and Engineering.Google Scholar