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Time of Flight Backscatter and Secondary Ion Spectrometry in a Helium Ion Microscope

Published online by Cambridge University Press:  01 August 2018

Nico Klingner
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, Dresden, Germany.
Gregor Hlawacek
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, Dresden, Germany.
Rene Heller
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, Dresden, Germany.
Johannes von Borany
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, Dresden, Germany.
Stefan Facsko
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, Dresden, Germany.

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Hlawacek, G., et al J. Vac. Sci. Technol. B Microelectron. Nanom. Struct. 32 2014) p. 020801.Google Scholar
[2] Hlawacek, G., et al in Helium Ion Microscopy (ed. G. Hlawacek and A. Golzhauser Springer International.Google Scholar
[3] Veligura, V., et al, J. Lumin. 157 2015) p. 321.Google Scholar
[4] Klingner, N., et al, Ultramicroscopy 162 2016) p. 91.Google Scholar
[5] Heller, R., Klingner, N. Hlawacek, G. in Helium Ion Microsc. (ed. G. Hlawacek and A. Golzhauser Springer International.Google Scholar
[6] Wirtz, T., Dowsett, D. Philipp, P. in Helium Ion Microsc. (ed. G. Hlawacek and A. Golzhauser Springer International.Google Scholar