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TEM/SEM Studies of microstructural transformations in ultrathin TiDy/Pd films evaporated on Si(100) after TDMS induced decomposition of the TiDy phase

Published online by Cambridge University Press:  03 August 2008

EG Keim
Affiliation:
University of Twente, The Netherlands
W Lisowski
Affiliation:
Polish Academy of Sciences, Poland
MA Smithers
Affiliation:
University of Twente, The Netherlands
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Copyright
© 2008 Microscopy Society of America

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