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Temperature-dependent signals in STEM Electron Beam-Induced Current (EBIC) Imaging

Published online by Cambridge University Press:  04 August 2017

William A. Hubbard
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA
Edward. R. White
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA
Matthew Mecklenburg
Affiliation:
Center for Electron Microscopy and Microanalysis, University of Southern California, Los Angeles, CA, USA
B. C. Regan
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Chung, MS & , TE Journal of Applied Physics 45 1974). p. 707709.Google Scholar
[2] White, ER, Kerelsky, A, Hubbard, WA, et al, Applied Physics Letters 107 2015 223104.Google Scholar
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[5] This work has been supported by FAME, one of six centers of STARnet, a Semiconductor Research Corporation program sponsored by MARCO and DARPA, by National Science Foundation (NSF) award DMR-1611036, and by NSF STC award DMR-1548924. The authors acknowledge the use of instruments at the Electron Imaging Center for NanoMachines supported by NIH 1S10RR23057 and the CNSI at UCLA.Google Scholar