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TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

  • M. Nose (a1), W. Chiou (a2), H. Takabatake (a3), T. Satho (a3), T. Kawabata (a3) and K. Matsuda (a3)...

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

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