Skip to main content Accessibility help

TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

  • M. Nose (a1), W. Chiou (a2), H. Takabatake (a3), T. Satho (a3), T. Kawabata (a3) and K. Matsuda (a3)...


Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed