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TEM Characterization of Single Crystal Silicon Film on Glass Substrate

Published online by Cambridge University Press:  01 August 2005

S C Cheng  and
K P Gadkaree
S C Cheng
Affiliation:
Corning Incorporated
K P Gadkaree
Affiliation:
Corning Incorporated

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 234 - 235
Copyright
© 2005 Microscopy Society of America