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A Study of the Cleaning Effectiveness of the Evactron(R) RF Plasma System on a Scanning Electron Microscope

Published online by Cambridge University Press:  01 August 2005

R Garcia ,
A Batchelor ,
C Mooney ,
K Bunker ,
D Griffis ,
V Carlino ,
R Vane  and
P Russell
R Garcia
Affiliation:
NC State University, North Carolina
A Batchelor
Affiliation:
NC State University, North Carolina
C Mooney
Affiliation:
NC State University, North Carolina
K Bunker
Affiliation:
NC State University, North Carolina
D Griffis
Affiliation:
NC State University, North Carolina
V Carlino
Affiliation:
XEI Scientific, Redwood City, California
R Vane
Affiliation:
XEI Scientific, Redwood City, California
P Russell
Affiliation:
NC State University, North Carolina

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 760 - 761
Copyright
© 2005 Microscopy Society of America