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STEM-tomography in SEM

Published online by Cambridge University Press:  30 July 2021

Luyang Han ,
Markus Boese ,
Benjamin Tordoff ,
Matthew Andrew  and
Evan Drake
Luyang Han
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Markus Boese
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Benjamin Tordoff
Affiliation:
Carl Zeiss Microscopy GmbH, Germany
Matthew Andrew
Affiliation:
Carl Zeiss X-ray Microscopy, United States
Evan Drake
Affiliation:
Carl Zeiss X-ray Microscopy, United States

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1060 - 1061
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Morandi, V. et al. , AIP Conference Proceedings 1667, 020013 (2015)Google Scholar