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Site Specific TEM Specimen Preparation using an FIB/TEM System

Published online by Cambridge University Press:  02 July 2020

T. Kamino ,
T. Yaguchi ,
T. Ohnishi ,
K. Umemura  and
S. Tomimatsu
T. Kamino
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, 312-8504, Japan
T. Yaguchi
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, 312-8504, Japan
T. Ohnishi
Affiliation:
Instruments Division, Hitachi Ltd., 882 Ichige, Hitachinaka, 312-8504, Japan
K. Umemura
Affiliation:
Central Research Laboratory Hitachi Ltd., Kokubunji, 185-8601, Japan
S. Tomimatsu
Affiliation:
Central Research Laboratory Hitachi Ltd., Kokubunji, 185-8601, Japan
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Extract

The focused ion beam(FIB) technique, developed for the microelectronics industry has become a major method for site specific transmission electron microscopy(TEM) specimen preparation in a wide range of materials[l]. The FIB lift-out technique has improved the specimen preparation procedures by removing complicated initial fabrication required prior to the FIB milling[2]. However, conventional FIB techniques are still having increased difficulty in meeting failure analysis needs from high technology industries such as microelectronics.

We have developed a site specific TEM specimen preparation method using a combination of an FIB instrument and an intermediate voltage TEM equipped with a scanning attachment [3]. In this method, the specimen is mounted on an FIB-TEM compatible specimen holder, so that localization of the specific site can be carried out in the FIB and TEM using the same holder. The scanning electron imaging mode may be used to observe surface structures of the milled area, and the scanning transmission electron microscopy(STEM) mode may be used to observe structures inside of the milled surface.

Type
Applications and Developments of Focused Ion Beams
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 510 - 511
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Basile, D.P. et al., Mat.Res.Soc.Symp.Proc.Vol.254,(1991) 23–41CrossRefGoogle Scholar
2.Gianuzzi, L.A et al., Mat.Res.Soc.Symp.Proc.Vol.480,(1997) 19CrossRefGoogle Scholar
3.Kamino, T. et al., Proc. Microscopy and Microanalysis, (1998)654Google Scholar
4.Kamino, T. et al., Proc. Microscopy and Microanalysis, (1999) 914Google Scholar
5.Ohnishi, T. et al., Proc. 25th Int. Symp. for Testing and Failure Analysis, (1999) 449Google Scholar