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Separation of EBIC Modes with Two-Channel STEM EBIC

Published online by Cambridge University Press:  22 July 2022

William A. Hubbard ,
Ho Leung Chan ,
Matthew Mecklenburg  and
B. C. Regan
William A. Hubbard*
Affiliation:
NanoElectronic Imaging, Inc., Los Angeles, CA, USA University of California, Los Angeles and the California NanoSystems Institute, Los Angeles, USA
Ho Leung Chan
Affiliation:
University of California, Los Angeles and the California NanoSystems Institute, Los Angeles, USA
Matthew Mecklenburg
Affiliation:
University of California, Los Angeles and the California NanoSystems Institute, Los Angeles, USA
B. C. Regan
Affiliation:
NanoElectronic Imaging, Inc., Los Angeles, CA, USA University of California, Los Angeles and the California NanoSystems Institute, Los Angeles, USA
*
*Corresponding author: bhubbard@nanoelectronicimaging.com

Abstract

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Type
Advanced Imaging and Spectroscopy for Nanoscale Materials
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2508 - 2509
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Copyright
Copyright © Microscopy Society of America 2022

References

Everhart, TE, Wells, OC, and Matta, RK, Proceedings of the IEEE, 52 (1964). p. 1642–1647CrossRefGoogle Scholar
Hubbard, WA et al. , Physical Review Applied, 10 (2018), p. 044066CrossRefGoogle Scholar
Hubbard, WA et al. , Applied Physics Letters 115 (2019), p. 133502.CrossRefGoogle Scholar
Mecklenburg, M et al. , Ultramicroscopy, 207 (2019), p. 112852.CrossRefGoogle Scholar
Hubbard, WA et al. , Advanced Functional Materials 32 (2022), p. 2102313.Google Scholar
This material is based upon work supported by the Defense Microelectronic Activity under Contract No. HQ072721C0002, and by NSF STC award DMR-1548924 (STROBE), NSF award DMR-2004897, and the Semiconductor Research Corporation (SRC).Google Scholar