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Secondary Electron Contrast in STEM Electron Beam-Induced Current (EBIC): a Path Towards Mapping Electronic Structure

Published online by Cambridge University Press:  01 August 2018

William A. Hubbard ,
Matthew Mecklenburg ,
Ho Leung Chan  and
B. C. Regan
William A. Hubbard
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, USA.
Matthew Mecklenburg
Affiliation:
Center for Electron Microscopy and Microanalysis, University of Southern California, Los Angeles, USA.
Ho Leung Chan
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, USA.
B. C. Regan
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, USA.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1846 - 1847
Copyright
© Microscopy Society of America 2018 

References

[1] Reimer, L in Scanning electron microscopy: physics of image formation and microanalysis. Springer Berlin.Google Scholar
[2] White, ER, Kerelsky, A, Hubbard, WA, et al, Applied Physics Letters 107 2015 223104.Google Scholar
[3] Chang, W, et al 28th Aerospace Sciences Meeting and Exhibit Proceedings (2000)..Google Scholar
[4] Holzl, J. in Solid surface physics. Springer Berlin.Google Scholar
[5] This work has been supported by FAME, one of six centers of STARnet, a Semiconductor Research Corporation program sponsored by MARCO and DARPA, by National Science Foundation (NSF) award DMR-1611036, and by NSF STC award DMR-1548924. The authors acknowledge the use of instruments at the Electron Imaging Center for NanoMachines supported by NIH 1S10RR23057 and the CNSI at UCLA.Google Scholar