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Scanning Auger for Defect Root Cause Analysis: Advantages & Application Challenges

Published online by Cambridge University Press:  01 August 2005

Y Uritsky  and
A Anapolsky
Y Uritsky
Affiliation:
Applied Materials,Inc.
A Anapolsky
Affiliation:
Applied Materials,Inc.

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 1610 - 1611
Copyright
© 2005 Microscopy Society of America