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The Role of Multi-Hit Detection Events on the Accurate Measurement of Boron in Atom Probe Tomography

  • Frederick Meisenkothen (a1), Ty J. Prosa (a2), Eric B. Steel (a1) and R. Prakash Kolli (a3)
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Abstract

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References

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[1] Gault, B., et al., Atom Probe Microscopy, (Springer, NY) (2012, p. 223.
[2] Larson, D.J., et al., Handbook of Instrumentation and Techniques for Semiconductor Nanostructure Characterization, London: World Scientific Publishing, Vol. 2 (2011) 407.
[3] Certain commercial equipment, instruments, or materials are identified in this paper in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.
[4] Saxey, D.W. Ultramicroscopy, 111 (2011, p. 473.
[5] The authors would like to thank Dr. Karen Henry of Intel Corporation for her continued interest in this project. We also extend our appreciation to Dr. Doug Meier of NIST for providing some of the specimen materials used in this study.

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