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Resolving 45 pm with 300 kV Aberration Corrected STEM

Published online by Cambridge University Press:  27 August 2014

H. Sawada ,
N. Shimura ,
K. Satoh ,
E. Okunishi ,
F. Hosokawa ,
N. Shibata  and
Y. Ikuhara
H. Sawada
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
N. Shimura
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
K. Satoh
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
E. Okunishi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
F. Hosokawa
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
N. Shibata
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Tokyo 113-8656Japan
Y. Ikuhara
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Tokyo 113-8656Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 124 - 125
Copyright
Copyright © Microscopy Society of America 2014 

References

References:

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