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Relationship between TEM Microstructures of Al Films and Reflectance in Color Display Tubes

Published online by Cambridge University Press:  02 July 2020

S. J. Lee
Affiliation:
Technology Division of Samsung Display Devices Co., Suwon, Kyungki-Do, South Korea.
E.S. Hwang
Affiliation:
Technology Division of Samsung Display Devices Co., Suwon, Kyungki-Do, South Korea.
T. Dolukhanyan
Affiliation:
Center for Advanced Materials, Dept. Of Chemical Engineering, University of Massachusetts, Lowell, MA, 01854
C. M. Sung
Affiliation:
Center for Advanced Materials, Dept. Of Chemical Engineering, University of Massachusetts, Lowell, MA, 01854
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Extract

Al films have been deposited on the inside of the Color Display Tube (CDT) panel on which black matrix carbon and RGB phosphors were coated to improve brightness with the prevention of voltage down and less ion impact to phosphors. The characteristics of Al films have a close relationship with the deposition variables such as base pressure and deposition rate causing changes in Al film microstructures and differences in the reflectance. It is generally known that the reflectance is affected by the thickness, grain size, and surface roughness of the Al film: The grain size of the Al film tends to decrease when base pressure is poor due to the presence of residual gas. The reflectance of Al alloys was reported to be increased with the larger grain size.

The purpose of this study is to understand the relationship between the reflectance and the microstructures of Al films as a function of base pressure in a CDT manufacturing to optimize deposition conditions for improved reflection properties.

Type
Microscopy and Microanalysis in the “Real World”
Copyright
Copyright © Microscopy Society of America

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References

References:

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