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Quantitative X-ray Photoelectron Spectroscopy Imaging for Small Feature Compositional Screening

Published online by Cambridge University Press:  09 October 2013

D.J. Surman ,
S.C. Page ,
A.J. Roberts  and
S.J. Coultas
D.J. Surman
Affiliation:
S.C. Page
Affiliation:
A.J. Roberts
Affiliation:
S.J. Coultas
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1068 - 1069
Copyright
Copyright © Microscopy Society of America 2013