Skip to main content Accessibility help
×
Home

Quantitative Thin-Film X-ray Microanalysis by STEM/HAADF: Statistical Analysis for Precision and Accuracy Determination

  • Aldo Armigliato (a1), Roberto Balboni (a1) and Rodolfo Rosa (a1) (a2)

Abstract

Silicon-germanium thin films have been analyzed by EDS microanalysis in a field emission gun scanning transmission electron microscope (FEG-STEM) equipped with a high angular dark-field detector (STEM/HAADF). Several spectra have been acquired in the same homogeneous area of the cross-sectioned sample by drift-corrected linescan acquisitions. The Ge concentrations and the local film thickness have been obtained by using a previously described Monte Carlo based “two tilt angles” method. Although the concentrations are in excellent agreement with the known values, the resulting confidence intervals are not as good as expected from the precision in beam positioning and tilt angle position and readout offered by our state-of-the-art microscope. The Gaussian shape of the SiKα and GeKα X-ray intensities allows one to use the parametric bootstrap method of statistics, whereby it becomes possible to perform the same quantitative analysis in sample regions of different compositions and thicknesses, but by doing only one measurement at the two angles.

Copyright

Corresponding author

Corresponding author. E-mail: aldo.armigliato@imm.cnr.it

References

Hide All

REFERENCES

Armigliato, A. (1999). Thin film X-ray microanalysis with the analytical electron microscope. J Anal At Spectrom 14, 413418.
Armigliato, A. & Rosa, R. (1990). Simultaneous determination of composition and thickness of thin films by X-ray microanalysis at 300 kV and Monte Carlo simulation. Ultramicroscopy 32, 127136.
Egerton, R.F. (1996). Electron Energy-Loss Spectroscopy in the Electron Microscope, 2nd ed. New York: Plenum Press.

Keywords

Quantitative Thin-Film X-ray Microanalysis by STEM/HAADF: Statistical Analysis for Precision and Accuracy Determination

  • Aldo Armigliato (a1), Roberto Balboni (a1) and Rodolfo Rosa (a1) (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed