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Quality Assurance of Energy Dispersive Spectrometry Systems

Published online by Cambridge University Press:  02 July 2020

E. B. Steel ,
R. B. Marinenko  and
R. L. Myklebust
E. B. Steel
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, MD, 20899
R. B. Marinenko
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, MD, 20899
R. L. Myklebust
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, MD, 20899
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Extract

Monitoring the performance capabilities of energy dispersive X-ray spectrometers (EDS) and related x-ray analysis electronics and software is important for determining and improving the reliability, sensitivity, and accuracy of the x-ray analysis system. In addition, there is a growing popularity of quality systems through laboratory accreditation and ISO 9000 related programs that require set quality control procedures for analytical instrumentation. Having similar standard procedures amongst labs would allow direct intercomparison of results. This intercomparison would help labs and manufacturers determine what are normal versus abnormal results and lead to higher quality instruments and analyses. We have been developing a standard operating procedure for the characterization of EDS x-ray analysis systems on electron beam instruments.

We are designing the procedure to maximize the efficiency of each quality control (QC) measurement so that we spend as little time monitoring the analysis system as is possible. We first chose useful QC specimens and then designed data collection methods.

Type
Quantitative Biological and Materials Microanalysis by Electrons and X-Rays
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 903 - 904
Copyright
Copyright © Microscopy Society of America 1997

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References

Certificate of Analysis SRM 482: Gold-Copper Wires for Microprobe Analysis, NIST, Gaithersburg, MD, 20899.Google Scholar
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Myklebust, R.Let al., in Microbeam Analysis-1990, New York:Plenum (1990)147.Google Scholar
NIST/NIH Desktop Spectrum Analyzer Program and X-Ray Database: Version 2.5, Standard Reference Database 36, NIST, Gaithersburg, MD, 20899.Google Scholar