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Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source

  • Yuka Esashi (a1), Christina L. Porter (a1), Michael Tanksalvala (a1), Galen P. Miley (a2), Naoto Horiguchi (a3), Joshua L. Knobloch (a1), Jihan Zhou (a4), Robert M. Karl (a1), Peter Johnsen (a1), Charles S. Bevis (a1), Bin Wang (a1), Seth L. Cousin (a5), Michael Gerrity (a1), Henry C. Kapteyn (a1) (a5) and Margaret M. Murnane (a1) (a5)...
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Abstract

Copyright

Corresponding author

*Corresponding author: yuka.esashi@colorado.edu

References

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[1]Miao, J., et al. , Science 348 (2015), p. 530-535.
[2]Maiden, A. M. and Rodenburg, J. M., Ultramicroscopy 109 (2009), p. 1256-1262.
[3]Shanblatt, E. R., et al. , Nano letters 16 (2016), p. 5444-5450.
[4]Gardner, D. F., et al. , Nature Photonics 11 (2017), p. 259-263.
[5]Karl, R. M., et al. , Science Advances 4 (2018), eaau4295.
[6]Porter, C.L., et al. , Optica 4 (2017), p. 1552-1557.
[7]The authors gratefully acknowledge support from NSF STROBE DMR-1548924, DARPA STTR Award # W31P4Q-17-C-0104, a Gordon and Betty Moore Foundation EPiQS Initiative through Grant GBMF4538, an NSF GRFP fellowship, and a NDSEG fellowship. H.K. and M.M. are partial owners of KMLabs.

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