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Probe Optimization studies For High current Focused Ion Beam Instruments

Published online by Cambridge University Press:  23 September 2015

Srinivas Subramaniam ,
John Richards  and
Kevin Johnson
Srinivas Subramaniam
Affiliation:
Intel Corporation, Hillsboro, USA.
John Richards
Affiliation:
Intel Corporation, Hillsboro, USA.
Kevin Johnson
Affiliation:
Intel Corporation, Hillsboro, USA.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1841 - 1842
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Subramaniam, Srinivas & Johnson, Kevin, Microsc. And Microanal. 20(S3 (2014) 296.Google Scholar
[2] Shida, Tan, Livengood, Richard, Greenzweig, Yuval, Drezner, Yariv & Shima, Darryl, J.Vac.Sci.Technol. B B 30 (2012) 06F606-1.Google Scholar
[3] Ben Assayag, G, Vieu, C, Gieerak, J., Sudraud, P. & Corbin, A., J.Vac. Sci.Technol B11(6, (1993).Google Scholar