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Plasma-Enhanced Chemical Vapor Deposition in a Transmission Electron Microscope?

Published online by Cambridge University Press:  03 December 2021

Jean-Luc Maurice ,
Pavel Bulkin ,
Éric Ngo ,
Weixi Wang ,
Pere Roca i Cabarrocas ,
Martin Foldyna  and
Ileana Florea
Jean-Luc Maurice
Affiliation:
LPICM, École polytechnique, CNRS, Institut Polytechnique de Paris, Palaiseau, France.
Pavel Bulkin
Affiliation:
LPICM, École polytechnique, CNRS, Institut Polytechnique de Paris, Palaiseau, France.
Éric Ngo
Affiliation:
LPICM, École polytechnique, CNRS, Institut Polytechnique de Paris, Palaiseau, France.
Weixi Wang
Affiliation:
LPICM, École polytechnique, CNRS, Institut Polytechnique de Paris, Palaiseau, France.
Pere Roca i Cabarrocas
Affiliation:
LPICM, École polytechnique, CNRS, Institut Polytechnique de Paris, Palaiseau, France.
Martin Foldyna
Affiliation:
LPICM, École polytechnique, CNRS, Institut Polytechnique de Paris, Palaiseau, France.
Ileana Florea
Affiliation:
LPICM, École polytechnique, CNRS, Institut Polytechnique de Paris, Palaiseau, France.

Abstract

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Type
Nucleation, Growth and Self-Assembling of Nanomaterials
Information
Microscopy and Microanalysis , Volume 27 , Supplement S2: Proceedings of CISCEM 2021 - the 5th Conference on In-Situ and Correlative Electron Microscopy , November 2021 , pp. 25 - 26
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

References:

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Wang, W. PhD thesis, Institut Polytechnique de Paris, École polytechnique, 2021.Google Scholar
Tang, J et al. , Nanoscale 9 (2017), p. 8113.Google Scholar
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Ngo, É. PhD thesis, Institut Polytechnique de Paris, École polytechnique, 2021.Google Scholar
This work was funded by the French National Research Agency - ANR: TEMPOS-NanoMAX (ANR-10-EQPX-50); HexaNW (ANR-17-CE09-0011). We kindly thank F. Glas, F. Panciera (C2N), for fruitful discussions, and F. Panciera doubly, for providing precious cantilever substrates. Thanks are also due to the CIMEX for the use of the electron microscopes at École polytechnique.Google Scholar