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Performance of Dynamically Simulated Reference Patterns for Cross-Correlation Electron Backscatter Diffraction

  • Brian E. Jackson (a1), Jordan J. Christensen (a1), Saransh Singh (a2), Marc De Graef (a2), David T. Fullwood (a1), Eric R. Homer (a1) and Robert H. Wagoner (a3)...

Abstract

High-resolution (or “cross-correlation”) electron backscatter diffraction analysis (HR-EBSD) utilizes cross-correlation techniques to determine relative orientation and distortion of an experimental electron backscatter diffraction pattern with respect to a reference pattern. The integrity of absolute strain and tetragonality measurements of a standard Si/SiGe material have previously been analyzed using reference patterns produced by kinematical simulation. Although the results were promising, the noise levels were significantly higher for kinematically produced patterns, compared with real patterns taken from the Si region of the sample. This paper applies HR-EBSD techniques to analyze lattice distortion in an Si/SiGe sample, using recently developed dynamically simulated patterns. The results are compared with those from experimental and kinematically simulated patterns. Dynamical patterns provide significantly more precision than kinematical patterns. Dynamical patterns also provide better estimates of tetragonality at low levels of distortion relative to the reference pattern; kinematical patterns can perform better at large values of relative tetragonality due to the ability to rapidly generate patterns relating to a distorted lattice. A library of dynamically generated patterns with different lattice parameters might be used to achieve a similar advantage. The convergence of the cross-correlation approach is also assessed for the different reference pattern types.

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Corresponding author

* Corresponding author. dfullwood@byu.edu

References

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Alkorta, J. (2013). Limits of simulation based high resolution EBSD. Ultramicroscopy 131, 3338.
Basinger, J., Fullwood, D., Kacher, J. & Adams, B. (2011). Pattern center determination in EBSD microscopy. Microsc Microanal 17, 330340.
Biggin, S. & Dingley, D. (1977). A general method for locating the X-ray source point for Kossel diffraction. J Appl Crystallogr 10, 376385.
Brigham Young University (2015). OpenXY. Available at https://github.com/byu-microstructureofmaterials/openxy (retrieved May 17, 2015).
Britton, T., Maurice, C., Fortunier, R., Driver, J., Day, A., Meaden, G., Dingley, D., Mingard, K. & Wilkinson, A. (2010). Factors affecting the accuracy of high resolution electron backscatter diffraction when using simulated patterns. Ultramicroscopy 110, 14431453.
Britton, T. & Wilkinson, A.J. (2012). High resolution electron backscatter diffraction measurements of elastic strain variations in the presence of larger lattice rotations. Ultramicroscopy 114, 8295.
Callahan, P. & De Graef, M. (2013). Dynamical EBSD patterns part I: Pattern simulations. Microsc Microanal 19, 12551265.
Deal, A., Hooghan, T. & Eades, A. (2008). Energy-filtered electron backscatter diffraction. Ultramicroscopy 108, 116125.
De Graef, M. (2015). Emsoft 3.0. Available at http://www.github.com/marcdegraef/emsoft (retrieved December 12, 2015).
Fullwood, D., Vaudin, M., Danies, C., Ruggles, T. & Wright, S. (2015). Validation of kinematically simulated pattern HR-EBSD for measuring absolute strains and lattice tetragonality. Mater Charact 107, 270277.
Gardner, C.J., Adams, B.L., Basinger, J. & Fullwood, D.T. (2010). EBSD-based continuum dislocation microscopy. Int J Plasticity 26, 12341247.
The HDF Group (2014). http://www.hdfgroup.org/ (retrieved December 12, 2015).
Humphreys, C. (1979). The scattering of fast electrons by crystals. Rep Prog Phys 42, 18251887.
Joy, D. (1995). Monte Carlo Modeling for Electron Microscopy and Microanalysis. USA: Oxford University Press.
Kacher, J., Basinger, J., Adams, B.L. & Fullwood, D.T. (2010). Reply to comment by Maurice et al. in response to “Bragg’s law diffraction simulations for electron backscatter diffraction analysis”. Ultramicroscopy 110, 760762.
Kacher, J., Landon, C., Adams, B.L. & Fullwood, D. (2009). Bragg’s law diffraction simulations for electron backscatter diffraction analysis. Ultramicroscopy 109, 11481156.
Landon, C., Adams, B. & Kacher, J. (2008). High resolution methods of characterizing mesoscale dislocation structures. J Eng Mater Technol 130, 021004021008.
Maurice, C., Dzieciol, K. & Fortunier, R. (2011). A method for accurate localisation of EBSD pattern centres. Ultramicroscopy 111, 140148.
Maurice, C., Fortunier, R., Driver, J., Day, A., Mingard, K. & Meaden, G. (2010). Comments on the paper “Bragg’s law diffraction simulations for electron backscatter diffraction analysis” by Josh Kacher, Colin Landon, Brent L. Adams and David Fullwood. Ultramicroscopy 110, 758759.
Mingard, K.P., Day, A.P. & Quested, P.N. (2014). Recent developments in two fundamental aspects of electron backscatter diffraction. IOP Conf Ser Mater Sci Eng 55, 012011.
Rice, K., Keller, R. & Stykovich, M. (2014). Specimen-thickness effects on transmission Kikuchi patterns in the scanning electron microscope. Microscopy 254, 129136.
Roşca, D. & De Graef, M. (2013). Area-preserving projections from hexagonal and triangular domains to the sphere and applications to electron back-scatter diffraction pattern simulations. Model Simulation Mater Sci Eng 21, 055021.
Roşca, D., Morawiec, A. & De Graef, M. (2014). A new method of constructing a grid in the space of 3D rotations and its applications to texture analysis. Model Simulation Mater Sci Eng 22, 075013.
Ruggles, T. & Fullwood, D. (2013). Estimation of bulk dislocation density based on known distortion gradients recovered from EBSD. Ultramicroscopy 133, 815.
Schwartz, A.J., Kumar, M., Adams, B.L. & Field, D.P. (2009). Electron Backscatter Diffraction in Material Science. New York: Springer.
Troost, K., Sluis, P. & Gravesteijn, D. (1993). Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope. Appl Phys Lett 62, 11101112.
Vaudin, M., Osborn, W., Friedman, L., Gorham, J., Vartanian, V. & Cook, R. (2015). Designing a standard for strain mapping: HR-EBSD analysis of SiGe thin film structures on Si. Ultramicroscopy 148, 94104.
Villert, S., Maurice, C., Wyon, C. & Fortunier, R. (2009). Accuracy assessment of elastic strain measurement by EBSD. J Microsc 233, 290301.
Wilkinson, A.J., Meaden, G. & Dingley, D.J. (2006). High-resolution elastic strain measurement from electron backscatter diffraction patterns: New levels of sensitivity. Ultramicroscopy 106, 301313.
Wilkinson, A.J. & Randman, D. (2010). Determination of elastic strain fields and geometrically necessary dislocation distributions near nanoindents using electron backscatter diffraction. Philos Mag 90, 11591177.
Winkelmann, A. (2010). Principles of depth-resolved Kikuchi pattern simulation for electron backscatter diffraction. J Microsc 239, 3245.
Winkelmann, A., Nolze, G., Vos, M., Salvat-Pujol, F. & Werner, W. (2016). Physics-based simulation models for EBSD: Advances and Challenges, IOP Conference Series: Material Science and Engineering, vol. 109.
Winkelmann, A., Trager-Cowan, C., Sweeney, F., Day, A.P. & Parbook, P. (2007). Many-beam dynamical simulation of electron backscatter diffraction patterns. Ultramicroscopy 107, 414421.
Wright, S. (1993). A review of automated orientation imaging microscopy (OIM). J Comput Assist Microsc 5, 207.
Wright, S. & Nowell, M. (2008). High-speed EBSD. Adv Mater Processes 166, 2931.
Wright, S., Nowell, M. & Basinger, J. (2011). Precision of EBSD based orientation measurements. Microsc Microanal 17, 406407.

Keywords

Performance of Dynamically Simulated Reference Patterns for Cross-Correlation Electron Backscatter Diffraction

  • Brian E. Jackson (a1), Jordan J. Christensen (a1), Saransh Singh (a2), Marc De Graef (a2), David T. Fullwood (a1), Eric R. Homer (a1) and Robert H. Wagoner (a3)...

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