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Origins and Contrast of the Electron Signals at Low Accelerating Voltage and with Energy-Filtering in the FE-SEM for High Resolution Imaging

Published online by Cambridge University Press:  23 September 2015

Hendrix Demers
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada.
Nicolas Brodusch
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada.
Patrick Woo
Affiliation:
Hitachi High-Technologies Canada Inc., Toronto, Canada.
Raynald Gauvin
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada.

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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[3] Joy, D.C., Journal of Microscopy 208 (2002). pp. 2434.Google Scholar
[4] Kim, J., etal, Journal of Vacuum Science Technology B 25 (2007). pp. 17711775.CrossRefGoogle Scholar