Hostname: page-component-7479d7b7d-767nl Total loading time: 0 Render date: 2024-07-11T04:37:53.900Z Has data issue: false hasContentIssue false
  • English
  • Français

Optimized Sample Preparation for the Imaging of Silicon Defects using Plan View Transmission Electron Microscopy

Published online by Cambridge University Press:  26 July 2009

N Wang ,
A Myers ,
M Sidorov ,
H Koo ,
C Yuan ,
B Tracy  and
S Li
N Wang
Affiliation:
Maxim
A Myers
Affiliation:
Spansion
M Sidorov
Affiliation:
Spansion
H Koo
Affiliation:
Spansion
C Yuan
Affiliation:
Altera
B Tracy
Affiliation:
Spansion
S Li
Affiliation:
Spansion

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 360 - 361
Copyright
Copyright © Microscopy Society of America 2009