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Optimization of EDX Tomography Acquisition Geometry for Electronic Device Characterization

Published online by Cambridge University Press:  30 July 2020

Frieder Baumann ,
Travis Mitchell ,
Dirk Utess  and
Christian Hobert
Frieder Baumann
Affiliation:
GLOBALFOUNDRIES, Inc., Malta, New York, United States
Travis Mitchell
Affiliation:
GLOBALFOUNDRIES, Inc., Malta, New York, United States
Dirk Utess
Affiliation:
GLOBALFOUNDRIES, Dresden, Sachsen, Germany
Christian Hobert
Affiliation:
GLOBALFOUNDRIES, Dresden, Sachsen, Germany

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 660 - 662
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Copyright
Copyright © Microscopy Society of America 2020

References

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Electron Tomography, Ed. Franck, Joachim, 2nd Edition, Springer, 2006 10.1007/978-0-387-69008-7CrossRefGoogle Scholar
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