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Optical Interferometer Microscope for Monitoring and Control of Focused Ion Beam Processes

Published online by Cambridge University Press:  31 July 2006

DP Adams ,
MB Sinclair ,
TM Mayer ,
MJ Vasile  and
WC Sweatt
DP Adams
Affiliation:
Sandia National Laboratories
MB Sinclair
Affiliation:
Sandia National Laboratories
TM Mayer
Affiliation:
Sandia National Laboratories
MJ Vasile
Affiliation:
Sandia National Laboratories
WC Sweatt
Affiliation:
Sandia National Laboratories

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1280 - 1281
Copyright
© 2006 Microscopy Society of America